Top > Nano-structured Thin Films
We develop novel fabrication method of nano-structured thin films, especially multilayers. Currently we focus on the AlN/FCC-metal multilayer structures. With this system we realize
- polarity control of c-axis oriented AlN
- strain control of the ultra thin metallic film sandwiched by AlN
- improvement of the interface smoothness
These materials are useful for surface accoustic wave (SAW) devices, RF filters, magnetic thin films as well as x-ray mirrors.
Contact Person : Yoshio Nakamura